Proceedings of JSPE Semestrial Meeting
2013 JSPE Autumn Conference
Session ID : L70
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Host: The Japan Society for Precision Engineering

Improving the Accuracy of Numerically Controlled Sacrificial Plasma Oxidation to Improve the Thickness Uniformity of SOI
*Hiroyasu Takei, Yasuhisa Sano, Satoshi Matsuyama, Kazuto Yamauchi
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Keywords: SOI(Silicon on Insulator), atmospheric-pressure plasma, sacrificial oxidation
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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