Proceedings of JSPE Semestrial Meeting
2013 JSPE Autumn Conference
Session ID : B16
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Host: The Japan Society for Precision Engineering

Super-Resolution Optical Inspection Using Overlapping Shift of Spot Illumination
Theoretical Analysis of Super-Resolution Characteristics
*Hiroki Yokozeki, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu
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Keywords: defect inspection, super-resolution optics, spot illumination
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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