Proceedings of JSPE Semestrial Meeting
2013 JSPE Spring Conference
Session ID : C20
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Host: The Japan Society for Precision Engineering

Annealing effect on the mechanical properties of FIB-processed silicon nanowires
*Tatsuya Fujii, Takahiro Namazu, Kouichi Sudoh, Shozo Inoue
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Keywords: Tensile test, Single-crystal silicon, Nanomaterial, FIB sampling, Annealing, NEMS
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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