Optical Design of Soft X-ray Focusing System with Large Aperture Rotation Mirror

Abstract

Ellipsoidal mirror is one of the most ideal focusing optics which has many advantages such as large aperture, long focal length, and no chromatic aberration. However, ellipsoidal mirror cannot show its great focusing ability sufficiently because the divergence angle of X-ray is very small. In order to solve this problem, we propose new optical system with spheroidal mirror and nearly flat mirror. This paper reports design method and results of ray tracing and wave optical simulation. We believe that this optical system will play important role in next generation soft X-ray beamline.