Proceedings of JSPE Semestrial Meeting
2013 JSPE Spring Conference
Session ID : D03
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Host: The Japan Society for Precision Engineering

Study for the polishing characteristic of alpha alumina
Examination for the crystal orientation dependence of polishing rate
*Mutsumi Okada, Hirofumi Suzuki, Chikara Inukai, Toshikazu Suzuki, Yasuo Higashi, Shinobu Aoyagi
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Keywords: Chemical Mechanical Polishing, Crystal orientation, Polishing rate, Sapphire
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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