Proceedings of JSPE Semestrial Meeting
2013 JSPE Spring Conference
Session ID : F73
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Host: The Japan Society for Precision Engineering

Development of a scanning nanopipette probe microscope for plasma jet nano processing
*Hiromitsu Sugimoto, Masaaki Nagatsu, Akihisa Ogino, Futoshi Iwata
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Keywords: plasma jet, shear force, nano pipette, fine processing, resist, surface measurement
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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