Proceedings of JSPE Semestrial Meeting
2013 JSPE Spring Conference
Session ID : I64
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Host: The Japan Society for Precision Engineering

Three-dimensional machining of a Silicon substrate by an infrared femtosecond Laser
*Hiroki Sakashita, Mitsuru Uewada, Rie Tanabe, Yoshiro Ito
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Keywords: Infrared femtosecond laser, Silicon
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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