Measurement for probe sphere diameter using microsphere resonator to measure with a high degree of accuracy by use of CMM

Proceedings of JSPE Semestrial Meeting

2013 JSPE Spring Conference

Session ID : N07

DOI https://doi.org/10.11522/pscjspe.2013S.0.897.0

Conference information

Host: The Japan Society for Precision Engineering

Measurement for probe sphere diameter using microsphere resonator to measure with a high degree of accuracy by use of CMM

*Ryosuke Gake, Masaki Michihata, Yasuhiro Takaya, Terutake Hayashi

Author information

Keywords: Micro CMM, Microsphere resonator, Measurement accuracy

CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

[in Japanese]

Content from these authors

© 2013 The Japan Society for Precision Engineering

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