2013 JSPE Spring Conference
Session ID : N33
Conference information
Host: The Japan Society for Precision Engineering
Concurrent measurement of radial, axial and angular motions of spindle using concentric circle grating interferometers
4th report: Measurement of error of low-speed rotation spindle
Keywords:
concentric circle grating,
spindle,
interferometer,
radial motion,
axial motion,
angular moshon
Details
