Proceedings of JSPE Semestrial Meeting
2013 JSPE Spring Conference
Session ID : O20
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Host: The Japan Society for Precision Engineering

Abrasive performance of carbon onion particles to single crystal silicon carbide
*Takafumi Sano, Atsushi Hirata
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Keywords: carbon onion, polishing, single crystal silicon carbide
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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