Proceedings of JSPE Semestrial Meeting
2014 JSPE Autumn Conference
Session ID : D03
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Host: The Japan Society for Precision Engineering

Evaluation of ultrasonic motor for ultralow temperature by using equivalent circuit
*Daisuke Yamaguchi, Yuya Noguchi, Takefumi Kanda, Koichi Suzumori
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Keywords: Ultrasonic Motor, Actuator, Ultralow temperature, Transducer
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[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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