Proceedings of JSPE Semestrial Meeting
2014 JSPE Autumn Conference
Session ID : D22
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Host: The Japan Society for Precision Engineering

Effect of bottom electrodes on the performance of electrostatic actuators having orthogonal sets of electrodes in layers
*Ryuta Iguchi, Akio Yamamoto
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Keywords: electrostatic actuator
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[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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