Abstract
This report describes a servo feeding control system used in micro electrochemical machining with the electrochemical induction feeding method. In the previous study, it was shown that the electrochemical induction feeding method developed by the authors can easily obtain ultra-short pulse duration voltage by using a feeding capacitance to couple a pulse power with electrodes. In order to avoid short circuit in the several micrometers working gap with the ultra-short voltage pulses, a servo feeding control system was developed according to the characteristics of electrostatic induction feeding method. The design principle and machining characteristics of the servo feeding control system will be investigated in this report. Experiments showed that with the servo feeding control system stable machining can be obtained without short circuit occurring, and much deeper micro-holes can be machined with good accuracy and without tool wear.