Proceedings of JSPE Semestrial Meeting
2014 JSPE Autumn Conference
Session ID : E32
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Host: The Japan Society for Precision Engineering

Discussion of ultraviolet irradiation polishing mechanism for single crystal diamond
*Sho Urakawa, Mutsumi Touge, Takeshi Sakamoto, Kounosuke Yamanaka, Akihisa Kubota
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Keywords: Diamond, Quartz, Polishing, Polishing rate, Polishing mechanism
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Abstract
[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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