Proceedings of JSPE Semestrial Meeting
2014 JSPE Autumn Conference
Session ID : E46
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Host: The Japan Society for Precision Engineering

Fabrication of ultra-precise X-ray mirrors by Ion Beam Figuring system (6th report)
Fabrication of aspheric surface using electrostatic deflection control
*Jumpei Yamada, Satoshi Matsuyama, Yasuhisa Sano, Kazuto Yamauchi
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Keywords: Ion beam, Aspherical mirror, Ultraprecision machining, X-ray focusing
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[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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