Abstract
This study describes about a newly developed on-machine measurement system for micro-factory with contact and non-contact dual probes. This system has a contact probe, which consist of thin plate cross, shaft and contact ball to detect wall profile of micro parts. Moreover, this system also has a non-contact probe. The laser passes the aperture of cross plate, and measures a displacement of measurement object by using laser trigonometry. A prototype sensor was developed for the first step to confirm our proposal style, and a series of experiments was conducted. Those results show the efficiency of this probe for measuring micro parts with micron order accuracy.
