Proceedings of JSPE Semestrial Meeting
2014 JSPE Autumn Conference
Session ID : Q21
Conference information

Host: The Japan Society for Precision Engineering

Super-Resolution Optical Inspection for Semiconductor Defects Using Standing Wave Shift
Simulation based verification for 2-Dimensional Super-Resolution with Coherent Image Reconstruction
*Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu
Author information
Keywords: defect inspection, super-resolution optics, standing wave illumination, coherent imaging
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (580K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2014 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top