Proceedings of JSPE Semestrial Meeting
2014 JSPE Autumn Conference
Session ID : Q23
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Host: The Japan Society for Precision Engineering

Absolute optical thickness measurement of thin film using wavelength tuning interferometry
*Kim Yangjin, Kenichi Hibino, Naohiko Sugita, Mamoru Mitsuishi
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Keywords: Thin Film, Absolute thickness, Wavelength tuning interferometry, Phase detection algorithm
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[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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