Study on the influence of the measured value on the Anti-reflective spray in Non-contact measurement.

Abstract

In non-contact measurement, in order to acquire measurement data stably, an antireflection spray is generally used. So, this research examined the optimal spray method and its verification method by investigating the influence which this antireflection spray exerts on measured value. Influence on the measured value by an application state was clarified, and the result checked that highly precise measurement could be performed.