Proceedings of JSPE Semestrial Meeting
2014 JSPE Spring Conference
Session ID : P44
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Host: The Japan Society for Precision Engineering

Mid-spatial frequency form representation of ultraprecision machined surface for optical simulation
*Shin-ya Morita, Yutaka Yamagata
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Keywords: Ultraprecision machining, mid-spatial frequency, ray-tracing, waviness, Nagata patch
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[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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