Proceedings of JSPE Semestrial Meeting

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2014 JSPE Spring Conference

Displaying 1-50 of 651 articles from this issue

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A novel sequential two-point method for straightness profile measurement based on a laterally sift (2nd report)

Comparative study on correction methods of parabolic error

Yuto Hoshino, Kazuhito Togawa, Kazuhisa Yanagi, Mamoru Hara

Session ID: A01
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_1

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Roundness Measurement Machine Using Multi-beam Angular measurement

Propose the new measurement system and verify the method

Soichiro Ueda, Meiyun Chen, Satoru Takahashi, Kiyoshi Takamasu

Session ID: A02
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_3

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Yusaku Nishimori, Dong Wei, Masato Aketagawa, Kazuhisa Yanagi

Session ID: A03
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_5

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Scanning flatness measurement using multi point method and angle correction. (1st Report)

Examination and verification experiment of measurement principle

Yoshiteru Fujita, Hiroki Shimizu, Yuuma Tamaru

Session ID: A04
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_7

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Keiichiro Hosobuchi, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao

Session ID: A07
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_11

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Four major characteristics of two-dimensional Fast M-Estimation based Gaussian Filter (FMGF)

Yuki Kondo, Munetoshi Numada, Hiroyasu Koshimizu

Session ID: A08
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_13

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Authors verified the deviation between the transmission ratio of FMGF and transmission ratio of GF at the cut-off wave length level λc is very few less than 0.001% if no outlier exists, and low computational cost of FMGF was verified at past presentations. This presentation verifies four major characteristic of two-dimensional FMGF that was applied to the roughness of the plane region not roughness of the line region.

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Measurement of diffraction light using lens surface minute shape by automotive lamp

Kenji Masuda, Tomohiro Takada, Shin Usuki, Kenjirou Miura, Takahiko Ao ...

Session ID: A09
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_15

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Optimization of multi-cluster system based on the conveyance course in the LSI manufacturing process

Yuki Koike, Jiang Zhu, Tomohisa Tanaka, Yoshio Saito

Session ID: A13
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_17

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Teturo Yoshioka, Ryota Satake, Shunji Maeda, Tadashi Suzuki, Tojiro No ...

Session ID: A14
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_19

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Ryota Satake, Tetsuro Yoshioka, Shunji Maeda, Tadashi Suzuki, Tojiro N ...

Session ID: A15
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_21

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Akihisa Takeda, Ryu Kato, Soichiro Morishita, Masao Sugi

Session ID: A16
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_23

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Product Design Information-driven Robot Assembly Virtual Validation System

Sachio Kobayashi, Hideki Abe, Hiroki Kobayashi, Masayoshi Hashima

Session ID: A17
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_25

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Yuki Nakamura, Satoshi Shimada, Daiki Ogata, Yohei Kurata, Jun Ota, Ta ...

Session ID: A19
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_27

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Motoyuki Ozaki, Toshimitsu Higashi, Tatsunori Hara, Jun Ota

Session ID: A20
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_29

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Toshiya Kaihara, Nobutada Fujii, Tomomi Nonaka, Tensuke Okuno, Masashi ...

Session ID: A21
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_31

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Nobutada Fujii, Toshiya Kaihara, Tomomi Nonaka, Masanori Sakaguchi

Session ID: A22
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_33

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Hiromichi Murata, Tatsuya Oku, Ryohei Seya, Miyu Ozaki, Ryoshu Furutan ...

Session ID: A30
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_35

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Visualization for Minute Refractive Index Change of Micro Flow by Light Interferometer based on Stochastic Resonance (2nd report)

Study of excitation signal for stochastic resonance

Phong Dang Tran, Masaki Michihata, Terutake Hayashi, Yasuhiro Takaya

Session ID: A31
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_37

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Toru Chayamichi, Takeshi Nagao, Norimichi Masuda, Hidetoshi Yokoi

Session ID: A32
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_39

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Ryota Hikichi, Keiske Nakamura, Katsunori Hanamura, Keisuke Nagato, Ma ...

Session ID: A33
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_41

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Sai Ma, Hidetoshi Yokoi, Kazuyuki Shibata

Session ID: A34
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_43

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Takuya Kumagai, Madden Muhummad, Yoshitaka Maeda, Masato Aketagawa

Session ID: A36
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_45

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A surface encoder with a multi-probe sensor head

Feasibility study on a method for six-degree-of-freedom measurement

Takeshi Ito, Xinghui Li, Yuki Shimizu, So Ito, Wei Gao

Session ID: A37
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_47

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Tomohito Zanka, Hiroki Shimizu, Yuuma Tamaru, Kenji Sakamoto

Session ID: A38
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_49

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Laser-assisted probe positioning system in a passive THz near-field microscope

Yuta Kanehara, Kuan-Ting LIN, Yusuke Kajihara

Session ID: A39
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_51

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Our passive THz-SNOM (Scanning Near-field Optical Microscope) probes spontaneous evanescent waves with several dozen nm resolution without external illumination. Now the THz-SNOM has a problem that we have to deposit little metal marks on studied samples for probe positioning. Therefore we develop an optical system using the local temperature change as a mark induced by a LASER spot. Here we report the evaluation of the developed optical system.

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Profile measurement using a gyro (2nd report)

Reverse measurement using a fiber optic gyro (FOG)

Tatsuya Kume, Masanori Satoh, Tsuyoshi Suwada, Kazuro Furukawa, Eiki O ...

Session ID: A43
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_53

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We consider profile measurement using a gyro, which can be applied for any direction including horizontal plane, for evaluating large objects precisely. Drift is considered to be a dominant error source for highly accurate optical gyro. We had considered applying reversal measurement for eliminating the drift and estimated its effect in the previous report. Here, we evaluate drift of the gyro and effect of the reversal measurement for preventing the drift from affecting the gyro measurement by using a relatively small but high-performance fiber optic gyro (FOG).

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Nanometer Profile Measurement on Large Aspheric Optical Surface (10th Report)

Self Calibration of Autocollimator in Experiment Set up

Kyohei Ishikawa, Tomohiko Takamura, Muzheng Xiao, Satoru Takahashi, Ki ...

Session ID: A44
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_55

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High accuracy aspheric mirrors and lenses with large dimension are widely used in the huge telescopes and other industry filed. But measuring method of large aspheric optical surface isn′t confirmed. The goal of our research is to measure the profile of large aspheric optical surface with accuracy of about 50 nm. We developed the autocollimator with CMOS as light receive element (CMOS type AC). In this report, we proposed self calibration method of sensitivity of autocollimator in experiment set up. We indicate the decrease the sensitivity error of CMOS type AC to ensure the effect of proposed method of Self calibration of autocollimator.

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Research on non-contact precise rough surface measurement using optical frequency combs

Rough surface measurement using optical frequency combs and rotating mirror

Zongluo Yang, Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu ...

Session ID: A45
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_57

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Evaluation of reference for X-ray computed tomography detector using a coordinate measuring machine with an imaging probing system

Mariko Kajima, Hiroyuki Fujimoto, Tsukasa Watanabe, Makoto Abe, Toshiy ...

Session ID: A46
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_59

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Portable Apparatus of Super Wide-field Fourier Spectroscopic Imaging for Environmental Measurement in Daily-life Environment

Keita Mori, QI Wei, Yo Suzuki, Hiroyuki Hiramatu, Masaru Fujiwara, Syu ...

Session ID: A47
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_61

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Study on measurement of surface texture with optically trapped micro-sphere (1st report)

Fundamental principle of imaging surface

Kosuke Takami, Masaki Michihata, Terutake Hayashi, Yasuhiro Takaya

Session ID: A61
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_63

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Measurement of biomembrane component by little-finger-size one-shot infrared Fourier-spectroscopic-imaging apparatus

Sho Nakada, Akane Ishida, Shun Sato, Yuki Tanaka, Satoru Suzuki, Abeyg ...

Session ID: A62
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_65

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Super-Resolution Optical Inspection Using Overlapping Shift of Spot Illumination

Development of Basic Experimenntal Equipment for Super Resolution Using Spot Illumination

Hiroki Yokozeki, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu

Session ID: A63
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_67

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Resolution improvement of optical microscopy using two beam interference of low-coherence light

Shin Usuki, Tomohiro Takada, Kenjiro Miura

Session ID: A64
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_69

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Standard for CD (Critical Dimension) Measurement (12th Report)

Measurement of Future Semi-conductor Structure using STEM Image

Haruki Okito, Satoru Takahashi, Kiyoshi Takamasu

Session ID: A66
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_71

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Surface roughness measurement using a metrological AFM (1st report)

Method based on the JIS R 1683:2007

Ichiko Misumi, Kazuya Naoi, Kentaro Sugawara, Satoshi Gonda

Session ID: A67
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_73

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Three-dimensional Shape Measurement of Micro-trench by Fluorescent Detection (2nd report)

Surface detection with intensity variation of fluorescent signal

Ayano Fukui, Masaki Michihata, Terutake Hayashi, Yasuhiro Takaya

Session ID: A68
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_75

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An ultra-high sensitive optical angle sensor

Influence of lens aberration due to the expansion of laser beam diameter

Dai Murata, Siew Leng Tan, Yuki Shimizu, So Ito, Wei Gao

Session ID: A69
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_77

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Diameter measurement of a microsphere using WGM resonances (2nd report)

Diameter determination based on WGM wavelength spectrum

Masaki Michihata, Atsushi Adachi, Terutake Hayashi, Yasuhiro Takaya

Session ID: A73
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_79

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Dimensional Measurement of Microstructures by Using a Nanopipette Ball Probe

So Ito, Issei Kodama, Wei Gao

Session ID: A74
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_81

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Development of a System for 3-D Micro Metrology Using an Ultra-Small Diameter Optical Fiber Probe

Optical Analysis and Evaluative Experiment Using the 1 μm Diameter Stylus Tip

Hiroshi Murakami, Akio Katsuki, Takao Sajima, Takuya Suematsu, Narumi ...

Session ID: A75
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_83

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Optical measurement system for evaluation of edge contour of diamond cutting tool

Yuki Shimizu, SungHo Jang, Wei Gao

Session ID: A76
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_85

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Surface shape measurement of transparent plate using phase extraction algorithm compensating quadratic nonlinearity

Yangjin Kim, Kenichi Hibino, Naohiko Sugita, Mamoru Mitsuishi

Session ID: A78
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_87

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Influence of charged sample on imaging of scanning ion conductance microscopy

Kimihiro Ishizaki, Masato Nakajima, Tatsuo Ushiki, Futoshi Iwata

Session ID: A79
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_89

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Palmtop-size wide-field Fourier-spectroscopic-imaging apparatus for forensics of printed paper

Tsubasa Saito, Masaru Fuziwara, You Suzuki, Hiroyasu Kagiyama, I Sai, ...

Session ID: A80
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_91

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Nanoparticle size evaluation by frequency domain fluorescence spectroscopy (2nd report)

Analysis of the relationship between particle size and rotational diffusion coefficient of fluorescent DNA probe

Yuki Ishizaki, Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya

Session ID: A81
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_93

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Automatic Processing of Broad-Band Interference Fringe Using Analog Electric Circuit

Hirokazu Matsumoto, Kiyoshi Takamasu

Session ID: A83
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_95

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Tatsumi Ito, Takato Yamagishi, Yasuhiro Sakai, Dong Wei, Masato Aketag ...

Session ID: A84
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_97

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Temporal coherence control in tandem interferometer for length measurement by optical frequency comb

Elimination of autocorrelation interference fringe by detection of beat signal

Dong Wei, Masato Aketagawa

Session ID: A85
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_99

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Study on laser processing using femto-second pulse train with coherent phonon excitation (2nd report)

Development on time-resolved evaluation system for coherent phonon excitation

Terutake Hayashi, Takahiro Ogiku, Masaki Michihata, Yasuhiro Takaya

Session ID: A06
Published: March 01, 2014
Released on J-STAGE: September 01, 2014

DOIhttps://doi.org/10.11522/pscjspe.2014S.0_9

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