Proceedings of JSPE Semestrial Meeting
2014 JSPE Spring Conference
Session ID : D08
Conference information

Host: The Japan Society for Precision Engineering

The effect of polishing pad internal structure on the polishing performance
*Keiichiro Fujimoto, Kazutaka Miyamoto, Miyuki Usutani, Kenjiro Ogata
Author information
Keywords: Pad, Polishing
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (581K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2014 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top