Proceedings of JSPE Semestrial Meeting
2014 JSPE Spring Conference
Session ID : E03
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Host: The Japan Society for Precision Engineering

The Fabrication Technology for PZT Thin Film Devices on 200 mm wafers
*Nobuyoshi Moriwaki, Takeshi Kobayashi, Natsumi Makimoto, Yasuhiro Suzuki, Koji Fujimoto, Kosuke Suzuki, Toshihiro Itoh, Ryutaro Maeda
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Keywords: Lead Zirconate Titanate, Piezoelectric Thin Film Devices, Mass Production, MEMS
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[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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