Proceedings of JSPE Semestrial Meeting
2014 JSPE Spring Conference
Session ID : E06
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Host: The Japan Society for Precision Engineering

Preparation of the high-density capacitors and its handling technology using self-assembled monolayer
Yuki Amano, Beomjoon Kim, *Masaaki Ichiki
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Keywords: ferroelectrics, high-density, self-assemble monolayer, piezoelectrics
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[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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