Proceedings of JSPE Semestrial Meeting
2014 JSPE Spring Conference
Session ID : H25
Conference information

Host: The Japan Society for Precision Engineering

[title in Japanese]
*Takayuki Sakaguchi, Kohei Okamura, WeiCheng Lin, Takahiro Yamada, Hiromasa Ohmi, Hiroaki Kakiuchi, Kiyoshi Yasutake
Author information
Keywords: atmospheric pressure, plasma, low temperature, silicon
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (639K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2014 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top