Proceedings of JSPE Semestrial Meeting
2014 JSPE Spring Conference
Session ID : I08
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Host: The Japan Society for Precision Engineering

Effect of Tool Surface Morphology on Polishing with Pyramidal Structured Polishing Pad
*SHAOQING LI, Ryunosuke Sato, Hideo Ueno
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Keywords: Fixed Abrasive Polishing, Pyramidal structured polishing pad, Surface Morphology, Si wafer
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[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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