2014 JSPE Spring Conference
Session ID : I15
Conference information
Host: The Japan Society for Precision Engineering
High Efficiency and Damage-free Planarization and Smoothing of Single Crystal Diamond utilizing Atmospheric Pressure Plasma Process
Numerically Controlled Microwave Plasma Jet for Planarization of Diamond Wafer
*Yuto Yamamoto, Takaaki Tabata, Shinya Makiyama, Katsuyoshi Endo, Kazuya Yamamura, Hideaki Yamada, Akiyoshi Chayahara, Yoshiaki Mokuno, Shinichi Shikata
Author information
Keywords:
Single crystal diamond,
Plasma jet,
Planarization by numerical controled system,
Damage-free
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