2014 JSPE Spring Conference
Session ID : I21
Conference information
Host: The Japan Society for Precision Engineering
Levitation and Deformation Characteristics of Silicon Wafer on Aerostatic Bearing-Type Non-Contact Suction Pad Made of Porous Carbon.
*Masato Tsujiuchi, Takashi Matsuoka, Tomoko Hirayama, Takashi Yamazaki, Kiyotaka Fujihira
Author information
Keywords:
Porous material
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