Proceedings of JSPE Semestrial Meeting
2014 JSPE Spring Conference
Session ID : A04
Conference information

Host: The Japan Society for Precision Engineering

Scanning flatness measurement using multi point method and angle correction. (1st Report)
Examination and verification experiment of measurement principle
*Yoshiteru Fujita, Hiroki Shimizu, Yuuma Tamaru
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Keywords: multi point method, Scanning Flatness Measurement
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Abstract
[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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