Proceedings of JSPE Semestrial Meeting
2014 JSPE Spring Conference
Session ID : A67
Conference information

Host: The Japan Society for Precision Engineering

Surface roughness measurement using a metrological AFM (1st report)
Method based on the JIS R 1683:2007
*Ichiko Misumi, Kazuya Naoi, Kentaro Sugawara, Satoshi Gonda
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Keywords: surface roughness, metrological atomic force microscope, calibration, profile, uncertainty, JIS R 1683:2007
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Abstract
[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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