Proceedings of JSPE Semestrial Meeting
2014 JSPE Spring Conference
Session ID : K01
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Host: The Japan Society for Precision Engineering

Electrode Arrangement Method for Position Independence in 2-DOF Synchronous Electrostatic Actuator
*Takuya Hosobata, Akio Yamamoto, Toshiro Higuchi
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Keywords: Actuator, Electrostatic Actuator, Planar Motor
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[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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