Proceedings of JSPE Semestrial Meeting
2014 JSPE Spring Conference
Session ID : K08
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Host: The Japan Society for Precision Engineering

Self-sensing control of multilayered piezoelectric actuator by permittivity detection
*Katsuhiro Saigusa, Takeshi Morita
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Keywords: Piezoelectric actuator, Self-sensing, Permittivity, Precise positioning control
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[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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