2014 JSPE Spring Conference
Session ID : K33
Conference information
Host: The Japan Society for Precision Engineering
Surface Acoustic Wave Linear Motor Using Segment-Structured Diamond-Like Carbon Films on Contact Surface
10th Report:Evaluation of Segment Shape Control Using S-DLC Films
*Kosuke Nakatani, Masaya Takasaki, Atsuyuki Takarada, Yumi Yoshida, Naoto Ohtake, Takeshi Mizuno
Author information
Keywords:
Ultrasonic Wave,
Surface Acoustic Wave,
Segment-Structured,
Diamond-Like Carbon Films,
Shape Control
Details
