2014 JSPE Spring Conference
Session ID : L39
Conference information
Host: The Japan Society for Precision Engineering
Development of Digital Acoustic Emission Sensor (3rd Report)
Fabrication and Electrical Evaluation of Si Piezoresistive Cantilever Array
*Takahiro Kawashima, Kazuo Muto, Takahiro Yamakami, Moeto Nagai, Takayuki Shibata
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