Proceedings of JSPE Semestrial Meeting
2015 JSPE Spring Conference
Session ID : Q75
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Host: The Japan Society for Precision Engineering

Development of plasma assisted polishing (12th report)
Evaluation of the polishing characteristics of CVD-SiC used for optical molds
*Hui Deng, Yusuke Imanishi, Katsuyoshi Endo, Kazuya Yamamura
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Keywords: CVD-SiC, plasma assisted polishing, surface roughness
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[in Japanese]
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© 2015 The Japan Society for Precision Engineering
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