Proceedings of JSPE Semestrial Meeting
2015 JSPE Spring Conference
Session ID : K15
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Host: The Japan Society for Precision Engineering

The form measurement of an aspherical mirror by High-speed Nanoprofiler
*Yusuke Tokuta, Takao Kitayama, Kenya Okita, Kohei Okuda, Motohiro Nakano, Shun Nakatani, Kazuya Yamamura, Ryota Kudo, Katsuyoshi Endo
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Keywords: metrology, profiler, repeatability, figure error, aspheric mirror, X-ray optics
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[in Japanese]
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© 2015 The Japan Society for Precision Engineering
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