2015 JSPE Spring Conference
Session ID : K16
Conference information
Host: The Japan Society for Precision Engineering
Characteristics investigation of shape deriving algorithm for nanoprofiler using normal vector tracing method
*Ryota Kudo, Kenya Okita, Kohei Okuda, Takao Kitayama, Yusuke Tokuta, Shun Nakatani, Motohiro Nakano, Kazuya Yamamura, Katsuyoshi Endo
Author information
Keywords:
aspheric mirror,
high-accuracy mirror,
normal vector,
profiler,
absolute figure measurement,
five-axis simultaneous control
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