2016 JSPE Autumn Conference
Session ID : E02
Conference information
Host: The Japan Society for Precision Engineering
Name : 2016 JSPE Autumn Conference
Location : [in Japanese]
Date : September 06, 2016 - September 08, 2016
Development of Nanofabrication Technique with Catalytically Active Platinum-Coated AFM Probe (3rd Report)
Effects of Applied Potential on Localized Material Removal Rate
Keywords:
Atomic force microscope (AFM),
Catalytically active platinum-coated probe,
Nanoscale catalytic chemical etching,
Nanofabrication,
MEMS
Details
