2016 JSPE Autumn Conference
Session ID : E01
Conference information
Host: The Japan Society for Precision Engineering
Name : 2016 JSPE Autumn Conference
Location : [in Japanese]
Date : September 06, 2016 - September 08, 2016
Effects of the substrate bias voltage on hydrogenated ECR-sputtered carbon film deposition
Hydrogenated carbon film and the substrate bias of the quality of the relationship
Details
