Mechanical properties of stainless steel films by rf magnetron sputtering using a SUS304 steel target

Abstract

Stainless steel films were deposited onto glass slide at RT by rf magnetron sputtering using a commercial SUS304 steel target. The effects of sputtering conditions on their compositions, crystallographic structures and mechanical properties were studied. The composition of as-deposited films was the same as that of the target material. We have succeeded to fabricate films having much higher hardness and fracture stress than bulk material by this method. The mechanical properties of the films showed a strong relationship with their internal stresses and depended on the Ar gas pressure during sputtering.