2016 JSPE Autumn Conference
Session ID : H07
Conference information
Host: The Japan Society for Precision Engineering
Name : 2016 JSPE Autumn Conference
Location : [in Japanese]
Date : September 06, 2016 - September 08, 2016
Study of the precision measurement of a slot die coater
Uncertainty analysis for on-line qualification of tip ball diameter of micro probe
*So Ito, Hirotaka Kikuchi, Ryo Kobayashi, Yuan-Liu Chen, Yuki Shimizu, Wei Gao, Kazuhiko Takahashi, Toshihiko Kanayama, Kunmei Arakawa, Atsushi Hayashi
Author information
Keywords:
Micro probe,
Uncertainty analysis,
On-line qualification,
Dimensional measurement,
Nanometrology
Details
