Proceedings of JSPE Semestrial Meeting
2016 JSPE Autumn Conference
Session ID : H09
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Study on measurement of surface texture with optically trapped micro-sphere (4th report)
Development of hybrid measurement system with optically trapped oscillation probe
*Yuki YamaguchiMasaki MichihataYasuhiro MizutaniYasuhiro Takaya
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CONFERENCE PROCEEDINGS FREE ACCESS

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[in Japanese]
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© 2016 The Japan Society for Precision Engineering
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