2016 JSPE Autumn Conference
Session ID : H09
Conference information
Host:
The Japan Society for Precision Engineering
Name :
2016 JSPE Autumn Conference
Location :
[in Japanese]
Date :
September 06, 2016 - September 08, 2016
Study on measurement of surface texture with optically trapped micro-sphere (4th report)
Development of hybrid measurement system with optically trapped oscillation probe