Development of running exposure method for high-precision displacement measurement of metal work based on triangulation method

Abstract

We newly developed a running exposure method for displacement measurement of a metal work by using a triangulation method. While the spot of the projected beam is moved in-plane direction of the metal work surface during the exposure time of a image sensor, the reflected light distribution from the metal rough surface is averaged by accumulating reflected light from the plurality of positions. We confirmed that the displacement measurement error is experimentally reduced from 33 μm to 5 μm by this method.