2016 JSPE Autumn Conference
Session ID : J37
Conference information
Host: The Japan Society for Precision Engineering
Name : 2016 JSPE Autumn Conference
Location : [in Japanese]
Date : September 06, 2016 - September 08, 2016
High accuracy fixing technique for a wafer using water film
Thinning characteristics of water film by spinner
*Kenichiro Yoshitomi, Atsunobu Une, Masaaki Mochida, Tsubasa Bando, Eiichi Yamamoto
Author information
Keywords:
water film chuck,
ultrathin water film,
backgrinding,
surface tension,
multilayer semiconductor
Details
