Proceedings of JSPE Semestrial Meeting
2016 JSPE Spring Conference
Session ID : C45
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Host: The Japan Society for Precision Engineering

Fabrication of TiN thin film by pulsed laser deposition for excitation of surface plasmon polaritons
*Yasushi Oshikane, Motohiro Nakano, Kensuke Murai
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Keywords: surface plasmon, titanium nitride, pulsed laser deposition, metal-insulator-metal structure, thin film, pulsed YAG laser
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Abstract
Researchers in surface plasmon resonance and surface plasmon polaritons are interested in alternate materials of noble metals. One of the alternate materials is metallic nitride. Authors have been focused on titanium nitride (TiN). Pulsed laser deposition (PLD) of the TiN film has been done to form flat and thin film with high crystallinity. In this talk, structural and optical estimation of a series of TiN films deposited by many different PLD conditions will be reported.
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© 2016 The Japan Society for Precision Engineering
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