Proceedings of JSPE Semestrial Meeting

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2016 JSPE Spring Conference

Displaying 1-50 of 514 articles from this issue

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Measurement of fine particulate defects with autonomous search and split multi-probe

Characteristics analysis of optical detection by FDTD simulation

Kazuki Tachibana, Shohei Asai, Masaki Michihata, Kiyoshi Takamasu, Sat ...

Session ID: A01
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_1

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Analysis of chemical polishing action in Cu-CMP with reactive nanoparticles using Raman spectroscopy enhanced by surface plasmon

Masafumi Asahi, Yasuhiro Takaya, Yasuhiro Mizutani

Session ID: A02
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_3

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Study on On-Machine Visualization of Surface Processing Phenomena in Nanoscale:the apparatus development

2nd report: Proposal of 3D tracking method of single interacting nanoparticle

Panart Khajornrungruang, Hiroaki Shirakawa, Keisuke Suzuki, Koya Sakai

Session ID: A03
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_5

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This report proposes a new method to three-dimensionally track each single nano-particle that has been interacting with a surface in nanoscale processing phenomena by using dual wavelength of evanescent field.

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Yuki Shimizu, Yuki Matsuno, Yuta Ohba, Wei Gao

Session ID: A04
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_7

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Hideaki Nozato, Wataru Kokuyama, Koichiro Hattori

Session ID: A06
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_9

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Retesting of Ultra-Clean Semiconductor-Gas Cylinders by Ultrasonic Examination

Minoru Suzuki, Eiichi Ishizaka, Yukio Shimoda

Session ID: A07
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_11

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Kazuya Matsuzaki, Osamu Sato, Hiroyuki Fujimoto, Makoto Abe, Toshiyuki ...

Session ID: A08
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_13

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Development of the gear measuring system for the production line (3rd report)

Evaluation of spatial measuring accuracy

Naoki Hashimoto, Maki Suzuki, Aiguo Ming, Tetuya Taguchi

Session ID: A09
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_15

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Chengshuo Jin, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi

Session ID: A13
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_17

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On-machine measurement of cutting tool edge profile by confocal fluorescence detection(2nd report)

Measuring by detecting fluorescence emitted from cutting oil

Kenji Maruno, Masaki Michihata, Yasuhiro Mizutani, Yasuhiro Takaya

Session ID: A14
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_19

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Study of the precision measurement of a slot die coater

Construction of the gap width measurement system by utilizing a micro-probe

Hirotaka Kikuchi, So Ito, Yuan-Liu Chen, Yuki Shimizu, Wei Gao, Kazuhi ...

Session ID: A15
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_21

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Development of form measurement of semiconductor structure (2nd Report)

Measurement of FinFET profile using TEM and CD-SEM imeges

Yuki Iwaki, Satoru Takahashi, Kiyoshi Takamasu

Session ID: A16
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_23

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Study on method of evaluation of areal surface roughness in consideration of measurement area effects

Calculation of confidence intervals using bootstrap method

Tomohiro Hayashi, Seiichiro Hara, Kazuyuki Sasajima

Session ID: A18
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_25

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Study on new algorithm of total variation for digital filter denoising

Hirotaka Ojima, Libo Zhou, Jun Shimizu, Teppei Onuki

Session ID: A19
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_27

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Yuki Kondo, Munetoshi Numada, Hiroyasu Koshimizu, Kazuhide Kamiya, Ich ...

Session ID: A20
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_29

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Characteristics of Measurement Accuracy in Wafer Thickness Inspections by Optical Spectroscopic Method (Part 2)

Yuki Nemoto, Teppei Onuki, Yutaro Ebina, Hirotaka Ojima, Jun Shimizu, ...

Session ID: A21
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_31

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Akifumi Kawasaki, Masaki Michihata, Yasuhiro Takaya, Yasuhiro Mizutani

Session ID: A31
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_33

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Yuu Narita, Yasuhiro Sakai, Dong Wei, Masato Aketagawa

Session ID: A32
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_35

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Study on measurement of surface texture with optically trapped micro-sphere (3rd report)

Position control of optically trapped micro-spherical lens near substrate

Yuki Yamaguchi, Masaki Michihata, Yasuhiro Mizutani, Yasuhiro Takaya

Session ID: A33
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_37

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Sinusoidal frequency modulation for frequency stabilization of laser diode to an I₂ saturated absorption line and a displacement measuring interferometer

Thanh Tung VU, Ryo YAMAZAKI, Masato HIGUCHI, Dong WEI, Masato AKETAGAW ...

Session ID: A34
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_39

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Laser diodes (LDs) have many advantages such as compact size, high power, and long lifetime compared with gas lasers. Moreover, LDs offer direct frequency modulation by modulating an injection current and large frequency tuning. Therefore, LDs are candidates of the light sources for the precise displacement measuring interferometers. However, the frequency stability of LDs is typically lower than He-Ne laser and hence the accuracy of displacement measurements can be decreased. The frequency stability of LDs can be improved by locking the LD frequency to the atomic or molecule absorption lines. Iodine molecule (I2) offers absorption lines that can be used as frequency references. In this paper, we propose the use sinusoidal frequency modulation on an LD to achieve both the frequency stabilization of the LD and a displacement measurement by a homodyne interferometer. A central frequency of the LD is locked to an I2 saturated absorption line near the wavelength of 633 nm. The I2 frequency stabilized LD is then applied to a Michelson interferometer. In this experiment, the displacement measurement at a resolution of nanometer can be achieved.

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Scanning flatness measurement using multi point method and angle correction. (3rd Report)

Proposal of a removal method of zero-adjustment error for flatness measurement.

Ryosuke Yamashita, Hiroki Shimizu, Yuma Tamaru, Takuya Hashiguchi, Kaz ...

Session ID: A36
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_41

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Tomoyuki Tamagawa, Yudai Natsume, Yutaka Uda, Shoichi Shimada, Ryosuke ...

Session ID: A37
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_43

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Improvement of warp measurement accuracy for large diameter silicon wafer using four-point-support

Yukihiro Ito, Masanori Kunieda

Session ID: A38
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_45

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Precision flatness measurement by an optical multi-beam angle sensor (2nd Report)

Calibration of the sensor and cylindrical surface measurement

Meiyun Chen, Satoru Takahashi, Kiyoshi Takamasu

Session ID: A39
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_47

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In this study, we show a new self-calibration method for calibrating autocollimator having nanometer accuracy is proposed, and the basic characteristics of the self-calibration are discussed. With the aid of the tilt-stage to ensure the motion move step by step, the multi-beam angle sensor was calibrated by the proposed method. Compared with the existing methods, the proposed model provides a feasible way to calibrate the sensor with better accuracy. Additionally, the results of calibration experiment and measurement of cylindrical surface are also presented in the paper.

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Profile measurement using a gyro (6th report)

Angle detection by using an axis of the Earth′s rotation as a reference

Tatsuya Kume, Masanori Satoh, Tsuyoshi Suwada, Kazuro Furukawa, Eiki O ...

Session ID: A43
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_49

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Profile shape evaluation by detecting tangential angles of the profile is competent for large objects because it does not need any shape references which become difficult to be defined enough accurate as the object becomes large. We consider profile evaluation using a gyro for detecting the angles. It can be applied for any angles even in a horizontal plane which cannot be evaluated by inclinometers. Here, the gyro is rotated around an axis perpendicular to its sensitive axis in order to eliminate its rate offset. We consider a method for detecting the angles by obtaining the direction of the rotating axis of the gyro against the direction of the angular velocity of the Earth′s rotation as a reference.

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Self-noise measurement of low-noise accelerometers using high-accuracy sensitivity calibration

Wataru Kokuyama, Hideaki Nozato, Koichiro Hattori

Session ID: A44
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_51

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Outliers reduction of a laser triangulation sensor using speckle boiling method

Koichi Kazama, Yuki Itakura, Tatsuki Otubo, Katsuhiro Miura, Hiroya Fu ...

Session ID: A45
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_53

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Fuminori Kimura, Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hiroka ...

Session ID: A61
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_55

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Yuudai Yamashita, Takehiro Nakagawa, Dong Wei, Masato Aketagawa

Session ID: A62
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_57

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Study on measurement of surface texture with optically trapped micro-sphere (2nd report)

Imaging with optically trapped micro-sphere

Jongkang Kim, Masaki Michihata, Yasuhiro Takaya, Yasuhiro Mizutani

Session ID: A63
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_59

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Yasuhiro Sakai, Dong Wei, Masato Aketagawa

Session ID: A64
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_61

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Ryo Yamazaki, Masato Higuchi, Thanh Tung Vu, Dong Wei, Masato Aketagaw ...

Session ID: A66
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_63

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Non-Mirror Type Absolute Length Measurement Technique Using Broad-Band Interferometer

Hirokazu Matsumoto, Kiyoshi Takamasu

Session ID: A67
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_65

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Michitaka Kawada, Takashi Sawada, Kohsei Terao, Takeyuki Hoshi, Shigem ...

Session ID: A68
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_67

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Basic Study on Process Planning and NC Program generation for Turning-Milling Tool with Multi-turrets

Ririko Kiyooka, Khusna Dwijayanti, Hideki Aoyama

Session ID: B13
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_69

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Kenta Koremura, Keiichi Nakamoto

Session ID: B14
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_71

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Mirror surface characteristics evaluation of surface processed by radius end mill with 5 axis control machine tools

Seigo Nakamura, Toshiki Hirogaki, Eiichi Aoyama

Session ID: B15
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_73

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Finishing mold with one tool is required to prevent step. Therefore, radius end mill which can perform wild and finishing process has been attracting attention lately. In this study we have checked the characteristics of the radius end mill by various toolpaths using 5 axis control machine tools. As a result, we understood that inclination angle is one of the significant factors that influences surface characteristics.

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Masanori Ishii, Koichi Morishige

Session ID: B16
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_75

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Yuta Sato, Koichi Morishige

Session ID: B17
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_77

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Tool swept volume generation method using tool swept profile curves for multi-axis machining with errors (3rd report)

Classification of tool motion based on the tangency conditional equation

Wataru Arai, Fumiki Tanaka, Masahiko Onosato

Session ID: B19
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_79

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Mashu Hiruya, Soichi Ibaraki

Session ID: B20
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_81

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Evaluation of Axial Displacement of Rotary Axis Caused by Motion Direction Change

Tadahiro Nishiguchi, Shogo Hasegawa, Ryuta Sato, Keiichi Shirase

Session ID: B21
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_83

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Evaluation of Behavior of Rotary Axis around Motion Direction Changes in 5-axis Controlled Machining Center

Shogo Hasegawa, Tadahiro Nishiguchi, Ryuta Sato, Keiichi Shirase

Session ID: B22
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_85

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Takanao Uchida

Session ID: B34
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_87

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A Design Process Analysis Method for Product Service System Design

Hiroki Tanaka, Keita Muto, Koji Kimita, Eriko Numata, Shigeru Hosono, ...

Session ID: B36
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_89

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A Task Management Method for Product-Service Systems Design

Keita Muto, Koji Kimita, Hiroki Tanaka, Eriko Numata, Shigeru Hosono, ...

Session ID: B37
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_91

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Study on Formalization of Modeling and Formulation Process in Multi-Disciplinary System Optimization

Ryouta Mochizuki, Koutarou Toda, Yutaka Nomaguchi, Kikuo Fujita

Session ID: B38
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_93

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A Modeling Method for Servitization Process based on Qualitative Simulation

Yoshiki Morishita, Fumika Murakami, Koji Kimita, Yoshiki Shimomura

Session ID: B43
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_95

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A Collaborative Design Method for Value Co-Creative Service

Satoshi Mizoguchi, Ryota Sugino, Koji Kimita, Yoshiki Shimomura

Session ID: B44
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_97

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Yusuke Saiki, Akira Tsumaya

Session ID: B45
Published: March 01, 2016
Released on J-STAGE: September 02, 2016

DOIhttps://doi.org/10.11522/pscjspe.2016S.0_99

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