2016 JSPE Spring Conference
Session ID : D64
Conference information
Host: The Japan Society for Precision Engineering
Study of Nano-stereolithography Using Evanescent Light (24th report)
Fabrication of complex fine patterns by multi-beam interference evanescent wave
*Yuki Suzuki, Kunikazu Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
Author information
Keywords:
Evanescent light,
Micro fabrication,
3D printers,
Micro-stereolithography,
Multi-beam interference
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