Abstract
The vibration-assisted scratching was performed to fabricate surface microtextures composed of numerous periodical complicated concavo-convex patterns anticipating future usage as the microtexture mold for injection molding. In the experiment, a pure copper plate and modeling wax were machined using a sharply pointed triangular diamond indenter tip vibrated by a piezo actuator in the direction of the scratching depth with µm order amplitude. As a result, texture patterns composed of numerous inverted triangular pyramidal impressions surrounded by pileups are successfully fabricated, and their average dimensions are less than 70 nm in height and 650 nm and 950 nm in pitches in scratching and feed directions, respectively.