2016 JSPE Spring Conference
Session ID : D76
Conference information
Host: The Japan Society for Precision Engineering
Development of Nanofabrication Technique with Catalytically Active Platinum-Coated AFM Probe (2nd Report)
Electrochemical Approach to Evaluate the Material Removal Mechanism
Keywords:
Atomic force microscope (AFM),
Catalytically active platinum-coated probe,
Nanoscale catalytic chemical etching,
Nanofabrication,
MEMS
Details
