Proceedings of JSPE Semestrial Meeting
2016 JSPE Spring Conference
Session ID : A21
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Host: The Japan Society for Precision Engineering

Characteristics of Measurement Accuracy in Wafer Thickness Inspections by Optical Spectroscopic Method (Part 2)
Yuki Nemoto, *Teppei Onuki, Yutaro Ebina, Hirotaka Ojima, Jun Shimizu, libo Zhou
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Keywords: wafer thickness meter, ground surface, measurement accuracy
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[in Japanese]
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© 2016 The Japan Society for Precision Engineering
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